Nisshin Highvoltage NT-1500. This accelarator is used for ion implatation.
Performance
|
Accelaration Voltage |
0.5～1.5MV |
|---|---|
|
Ion |
H, He, B～Au |
| Max. Ion Energy | 6MeV |
| Max. Ion Current | 150μA |
Beam Line
- Max. Size : 6 inch
- Target Holder: RT, Hot-implatation (Max. 500C), Cold-implantation
Controler
