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Research Center of Ion Beam TechnologyHOME
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- MEISwin,MEIS and RBS analysis software
- scatGUI,ion implantation & channeling simulation software
  - current version number : 1.42

Japanease

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Other facilities

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Elipsometer, clean room, stylus profiler, AFM

Elipsometer, clean room, stylus profiler, AFM

Clean Room

Clean Room

Elipsometer

Elipsometer

Stylus profiler

Stylus profiler

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